Full-field solder coverage

ABSTRACT

A system, apparatus, and method, are provided to deposit conductive bonding material into cavities in a mold. A fill head is placed in substantial contact with a mold that includes cavities. The fill head includes a sealing member that substantially encompasses an entire area to be filled with conductive bonding material. The conductive bonding material is forced out of the fill head toward the mold. The conductive bonding material is provided into at least one cavity of the cavities contemporaneous with the at least one cavity being in proximity to the fill head.

FIELD OF THE INVENTION

The present invention generally relates to the field of placement ofconductive bonding material such as solder on electronic pads, and moreparticularly relates to fill techniques for injection molding of solderon integrated circuit chip pads.

BACKGROUND OF THE INVENTION

In modern semiconductor devices, the ever increasing device density anddecreasing device dimensions demand more stringent requirements in thepackaging or interconnecting techniques of such devices. Conventionally,a flip-chip attachment method has been used in the packaging of ICchips. In the flip-chip attachment method, instead of attaching an ICdie to a lead frame in a package, an array of solder balls is formed onthe surface of the die.

Controlled Collapse Chip Connection New Process (“C4NP”) is anothermethod of depositing conducting bonding material onto molds. C4NP is asubset technology of IMS, which is further discussed in U.S. Pat. No.5,244,143 and is commonly owned by International Business MachinesCorporation, and is hereby incorporated by reference in its entirety.C4NP allows the creation of pre-patterned solder balls to be completedwhile a silicon wafer is still in the front-end of a manufacturingfacility, potentially reducing cycle time significantly. The solderbumps can be inspected in advance and deposited onto the silicon waferin one simple step. In this technology, a solder head with an injectionaperture comprising molten solder scans over the surface of the mold. Inorder to fill the cavities on the mold, pressure is applied onto thereservoir of the C4NP head which comprises the molten solder as it isscanned over the cavities. The filling of the C4NP mold plate in areliable, high speed and cost-effective manner is a challenge. CurrentC4NP systems use a scanning fill head which covers only a portion of thetotal area to be filled at any one time. This approach requires sealingelements, which must contain solder, air, and/or vacuum at significantpressure differentials while the seal is scanned across the mold plate.

Therefore a need exists to overcome the problems with the prior art asdiscussed above.

SUMMARY OF THE INVENTION

Briefly, in accordance with the present invention, a method fordepositing conductive bonding material into a plurality of cavities in amold is disclosed. The method includes placing a fill head insubstantial contact with a mold comprising a plurality of cavities. Thefill head includes a sealing member that substantially encompasses anentire area to be filled with conductive bonding material. Theconductive bonding material is forced out of the fill head toward themold. The conductive bonding material is provided into at least onecavity of the plurality of cavities contemporaneous with the at leastone cavity being in proximity to the fill head.

In another embodiment, another method for depositing conductive bondingmaterial into a plurality of cavities in a mold is disclosed. The methodincludes placing a fill head in substantial contact with a moldcomprising a plurality of cavities. The fill head comprises a sealingmember that substantially encompasses an entire area to be filled withconductive bonding material. The mold is situated on top of the fillhead and the fill head is situated so that the sealing member is facingin a upward direction with respect to the plurality of cavities. Thefill head and mold are transitioned so that the fill head is situated ontop of the mold and so that the plurality of cavities is facing in anupward direction with respect to the sealing member. The conductivebonding material is forced out of the fill head toward the mold. Theconductive bonding material is provided into at least one cavity of theplurality of cavities contemporaneous with the at least one cavity beingin proximity to the fill head.

An advantage of the foregoing embodiments of the present invention isthat conductive bonding material such as solder can be preciselydispensed into the mold plate using a full-field solder fill head thatcan cover the entire region to be filled. The present invention allowsthe seal(s) of the fill head to be stationary during the solder fillprocess steps where the highest pressure differentials occur. The fillhead seals only slide over the mold surface during the solder fillprocess steps where relatively low pressure differentials are required.Stated differently, the present invention does not require a sealingmember to withstand large pressure differentials while sliding across amold plate. Another advantage of various embodiments of the presentinvention is that air can be evacuated from all cavities so that thecavities can be reliably filled with pressurized solder.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying figures where like reference numerals refer toidentical or functionally similar elements throughout the separateviews, and which together with the detailed description below areincorporated in and form part of the specification, serve to furtherillustrate various embodiments and to explain various principles andadvantages all in accordance with the present invention.

FIG. 1 is a block diagram showing a top view of a conventional C4NP moldfill process;

FIG. 2 is a block diagram showing a cross-sectional view of theconventional C4NP mold fill process of FIG. 1;

FIG. 3 is a block diagram showing a cross-sectional view of an exampleof a full-field fill head according to one embodiment of the presentinvention;

FIG. 4 is a block diagram showing a top view of the full-field fill headof FIG. 3;

FIG. 5 is a block diagram showing a cross-sectional view of anotherexample of a full-field fill head according to one embodiment of thepresent invention;

FIG. 6 is block diagram showing a top view of the full-field fill headof FIG. 5;

FIG. 7 is a block diagram showing a cross-sectional view of a full-fieldcoverage system according to one embodiment of the present invention;

FIG. 8 is a block diagram showing a top view of the full-field coveragesystem of FIG. 7;

FIG. 9 is a block diagram showing a cross-sectional view of anotherfull-field coverage system according to one embodiment of the presentinvention;

FIG. 10 is a block diagram showing a top view of the full-field coveragesystem of FIG. 9;

FIG. 11 is a block diagram showing a cross-sectional view of yet anotherfull-field coverage system according to one embodiment of the presentinvention;

FIG. 12 is a block diagram showing a top view of the full-field coveragesystem of FIG. 11;

FIG. 13 is a block diagram illustrating a sequence of steps fordepositing conductive bonding material into cavities on a mold accordingto one embodiment of the present invention;

FIG. 14 is an operational flow diagram illustrating an example of aprocess of filling molds using a full-field coverage system according toone embodiment of the present invention;

FIG. 15 is an operational flow diagram illustrating another example of aprocess of filling molds using a full-field coverage system according toone embodiment of the present invention;

FIG. 16 is an operational flow diagram illustrating yet another exampleof a process of filling molds using a full-field coverage systemaccording to one embodiment of the present invention; and

FIG. 17 is an operational flow diagram continuing the process of FIG.16.

DETAILED DESCRIPTION

As required, detailed embodiments of the present invention are disclosedherein; however, it is to be understood that the disclosed embodimentsare merely exemplary of the invention, which can be embodied in variousforms. Therefore, specific structural and functional details disclosedherein are not to be interpreted as limiting, but merely as a basis forthe claims and as a representative basis for teaching one skilled in theart to variously employ the present invention in virtually anyappropriately detailed structure. Further, the terms and phrases usedherein are not intended to be limiting; but rather, to provide anunderstandable description of the invention.

The terms “a” or “an”, as used herein, are defined as one or more thanone. The term plurality, as used herein, is defined as two or more thantwo. The term another, as used herein, is defined as at least a secondor more. The terms including and/or having, as used herein, are definedas comprising (i.e., open language). The term coupled, as used herein,is defined as connected, although not necessarily directly, and notnecessarily mechanically.

Conventional C4NP Mold Fill Process

FIGS. 1-2 illustrate a conventional C4NP mold fill process. Inparticular FIG. 1 shows an overhead view of a conventional fill head 102dispensing solder into cavities 104 on a mold plate 106. FIG. 2 shows across-sectional view of FIG. 1. The conventional fill head 102 of FIGS.1-2 dispenses molten solder into the mold plate 106 utilizing a roundO-ring seal. In conventional C4NP systems the fill head 102 is heatedabove the melting point of the solder, for the case of Tin/Copper solderabove 230 C. The liquid solder is held in a reservoir 208 inside thefill head 102 and covered by a lid (not shown). The fill head 102 restson the mold plate 106 and 0-ring seal 210 prevents the solder fromleaking out the bottom of the fill head 102. The fill process begins byfirst applying a nominal load or down force on the O-ring seal 210,typically on the order of 2.5 lbs/linear inch. The fill head reservoir208 is then pressurized, usually to 20 psi, to ensure the solder entersthe mold plate cavities 104 during the fill process.

Next, the fill head 102 is moved across the mold plate surface,typically at a speed of between 0.1 to 10 mm/sec. As the fill head movesover the mold plate 106 the air in the cavities 104 is expelled andreplaced by liquid solder from the fill head 102. The mold plate 106with the solder filled cavities 104 is then removed and passed to thenext tool for transfer of the solder to a silicon wafer.

A key difficulty of this conventional approach is that the O-ring 210 issealing against significant solder pressure at the same time that it isbeing dragged across the mold surface. This requires that a sealmaterial be selected that can withstand high temperatures and soldercontact and seal against substantial pressure differential, while alsonot experiencing mechanical failure or excessive wear as a result ofcontact with the cavity-filled mold plate 106. Given that the mold plate106 is often made of glass and the cavities often have relatively sharpedges, it can be quite difficult to find a material that can withstandthe “filing action” of the mold-plate under the high compression forcesneeded to seal against solder leakage.

Full-Field Solder Coverage

According to an embodiment of the present invention, FIGS. 3-13illustrate a systems and methods for C4NP full-field solder coverageaccording to various embodiments of the present invention. In particularFIG. 3 shows a cross-sectional view of an example of a full-field fillhead 302. FIG. 4 is a top-view of the fill head 302 of FIG. 3. The fillhead 302, according to the present example, comprises an O-ring 310 thatsubstantially surrounds an area of a mold 306 to be filled. The mold inone embodiment can be rectangular, non-rectangular, or any combinationof shapes. In one embodiment, the conductive bonding material such assolder is forced out of the reservoir 308 and into the cavities 304using high pressure. The high pressure is applied while the mold 306 isstationary with respect to the fill head 306. This is advantageousbecause the large normal forces needed to seal against solder leakageare only needed when the seal 310 is stationary and when the seal islocated above smooth parts of the mold plate 306. After the solder isforced into the cavities 304 at high pressure, the pressure can bereduced while the mold 306 is translated out from underneath the fillhead 302. Since the sliding occurs only when the solder pressure is low,the normal force applied to the seal 310 can be low thereby reducingfriction and wear occurring at the seal 310.

FIG. 5 shows a cross-sectional view of another example of a full-fieldfill head 502. FIG. 6 illustrates a top-view of the fill head 502 shownin FIG. 5. The fill head 502 includes a rotating and/or agitating blade512 inside the molten solder pool 514. This blade 512 can be rotatedand/or agitated vigorously during various steps of the solder fillingprocess to improve the fill performance, which is discussed in greaterdetail below.

FIGS. 7-8 illustrate one embodiment of depositing a conductive bondingmaterial into cavities in a mold using a full-field coverage process.FIG. 7 shows a cross-sectional view of a full-field coverage system 700where a fill head 702 deposits solder into cavities 704 on a mold 706.FIG. 8 shows a top-view of the full-field coverage system 700 of FIG. 7.FIGS. 7-8 show a succession of the mold 706 during the solder fillingprocess. For example, FIGS. 7-8 show the mold 706 as empty, being filledwith solder, and filled with solder. As discussed above the full-fieldfill head 702 includes an O-ring seal 710 that substantially covers anarea on the mold 706 that is to be filled with solder.

In one embodiment, unfilled mold 706 is placed in position next to thefull-field solder fill head 702. The unfilled mold 706 is slidunderneath the fill head 702 while the solder is being held near ambientpressure. The seal 710 is held in contact with the mold 706 with justenough force to prevent/minimize any solder leakage during the motion. Aregion above the solder is filled with high-pressure gas such asnitrogen to force the solder into the mold cavities 704.

Once the solder has been forced into the cavities 704 and contacts thecavity walls, the gas pressure above the solder can generally be reducedwithout affecting the solder-filled cavities 704. The mold 706 is movedout from under the fill head 702 while the solder is held at arelatively low positive pressure with respect to the ambientenvironment. The wiping action of the seal 71 0 during this motion actsto squeegee the solder off of the mold surface, leaving only the solderwhich is in the mold cavities 704.

FIGS. 9-10 illustrate another embodiment of depositing a conductivebonding material into cavities in a mold using a full-field coverageprocess. FIG. 9 shows a cross-sectional view of a full-field coveragesystem 900 where a fill head 702 deposits solder into cavities 704 on amold 706 under a vacuum. The system 900 of FIG. 9 removes substantiallyall of the air from the cavities 904 of the mold 906 by drawing a vacuumabove the molten solder before the space above the solder is pressurizedto force the solder into the cavities 904. FIG. 10 shows a top-view ofthe full-field coverage system 900 of FIG. 9. FIGS. 9-10 show asuccession of the mold 906 during the solder filling process. Forexample, FIGS. 9-10 show the mold 906 as empty, being filled withsolder, and filled with solder. An unfilled mold 906 is placed inposition next to the full-field solder fill head 902.

In one embodiment, an unfilled mold 906 is slid underneath the fill head902 while the solder is being held near ambient pressure. The seal 910is held in contact with the mold 906 with just enough force toprevent/minimize any solder leakage during the motion. The region abovethe solder is evacuated, thereby causing most of the gas trapped in thecavities 904 to bubble up through the solder where it is carried away bythe vacuum source 916. The region above the solder is then filled withhigh-pressure gas such as nitrogen to force the solder into the moldcavities 904. Since most of the gas in the cavities 904 was removed inthe previous step, the pressurized solder is more likely to completelyfill the cavities as desired.

Once the solder has been forced into the cavities 904 and it makescontact with the cavity walls, the gas pressure above the solder cangenerally be reduced without affecting the solder-filled cavities. Themold 906 is moved out from under the fill head 902 while the solder isheld at a relatively low positive pressure with respect to the ambientenvironment. The wiping action of the seal 910 during this motion actsto squeegee the solder off of the mold surface, thereby leaving only thesolder which is in the mold cavities 904.

FIGS. 11-12 illustrate another embodiment of depositing a conductivebonding material into cavities in a mold using a full-field coverageprocess. FIG. 11 shows a cross-sectional view of a full-field coveragesystem 900 where a fill head 1102 deposits solder into cavities 1104 ona mold 1106 utilizing an agitator bar 1112. FIG. 12 shows a top-view ofthe full-field coverage system 1100 of FIG. 11. FIGS. 11-12 show asuccession of the mold 11 06 during the solder filling process. Theagitator bar 1112 is used to help dislodge gas bubbles during (andafter) the evacuation process stage discussed above. Without agitation,some of the gas trapped in the cavities 1104 can adhere to the mold assmall bubbles, even when a vacuum is drawn above the solder, asdiscussed above. By vigorously stirring the molten solder during thisphase, the heavy liquid solder can be used to dislodge such gas bubblesadhering to the mold 1106. Thus, the combination of vacuum above thesolder plus vigorous mechanical agitation can substantially improve theprobability that essentially all gas is removed from all cavities 1104in the mold 1106.

In one embodiment, an unfilled mold 1106 is placed in position next tothe full-field solder fill head 1102. The unfilled mold 1106 is slidunderneath the fill head 1102 while the solder is being held nearambient pressure. The seal 1110 is held in contact with the mold 1106with just enough force to prevent/minimize any solder leakage during themotion. The region above the solder is evacuated, thereby causing mostof the gas trapped in the cavities 1104 to bubble up through the solder,where it is carried away by the vacuum source 1116

The molten solder is vigorously stirred and/or agitated by the agitatorbar 1112 to dislodge any gas bubbles which remain adhered to the moldsurface. Any dislodged bubbles then rise to the surface of the solderwhere they are removed by the vacuum source 1116. The region above thesolder is then filled with high-pressure gas such as nitrogen to forcethe solder into the mold cavities 1114. Since most of the gas in thecavities 1114 was removed in the previous step, the pressurized solderis more likely to completely fill the cavities as desired. Once thesolder has been forced into the cavities 1114 and makes contact with thecavity walls, the gas pressure above the solder can generally be reducedwithout affecting the solder-filled cavities 1114. The mold 1106 ismoved out from under the fill head 1102 while the solder is held at arelatively low positive pressure with respect to the ambientenvironment. The wiping action of the seal 1110 during this motion actsto squeegee the solder off of the mold surface, leaving only the solderwhich is in the mold cavities 1104

FIG. 13 is a block diagram illustrating a sequence of steps for ensuringthat substantially all gas is removed from cavities 1304 in a mold 1306being filled with solder 1318. In this embodiment, substantially theentire fill head 1302 plus the mold plate 1306 is mounted as oneassembly in such a way that it can be rotated between a first positionand second position. A rotational mounting arrangement is mechanicallycoupled with the fill head for rotating the fill head and the mold asone mounted assembly. The rotational mounting arrangement can includeone or more mechanical and electrical components that can hold the fillhead and the mold as one assembly and can rotate the fill head and themold between the first and second positions. When the fill head and themold are together as one assembly, a volume is defined in the fill headbetween an inner surface of the fill head and a surface area of the moldincluding a plurality of cavities to be filled. In the first positionthe mold 1306 is below the fill head 1302 and gravity forces the solder1318 in contact with the mold 1306 (as discussed above). A secondposition is utilized where the mold 1306 is substantially at a topportion of the volume and above the fill head 1302 so that gravity holdsthe solder away from the mold plate 1306. By providing a system 1300whereby gravity holds the liquid solder away from the mold surface it ispossible to evacuate (e.g., via a gas exchange port in the fill head)the cavities 1304 directly without requiring any gases to bubble upthrough the solder 1318.

In this embodiment, the cavities 1304 can be fully and completelyevacuated while the solder is below the mold 1306. After the cavities1304 (and the rest of the free volume inside the fill head 1302) havebeen evacuated substantially the entire assembly is slowly flipped overso that the solder flows across the mold surface and pools above themold 1306. At this point, the solder 1318 might not perfectly wet theentire cavity surface (because of surface tension effects, etc.), andany gas trapped in the cavities 1304 can cause defects. Therefore,application (e.g., via a gas exchange port in the fill head) ofpressurized gas above the molten solder can now reliably force thesolder completely into all cavities 1304.

In one embodiment, an unfilled mold 1306, at times T₀ and T₁, istransitioned from a face-up position to a face-down position next to thefull-field solder fill head 1302. The full-field solder fill head 1302is orientated so that the seal 1310 is upward and the solder 1318 ispooled at the bottom of the head 1302, away from the seal 1310. At timeT₂ 2, the unfilled mold 1306 is slid across (above) the fill head 1302while gravity holds the solder 1318 away from the seal 1310 and moldplate 1306. The gas above the solder 1318 such as nitrogen is held nearthe ambient pressure. The seal 1310 is held in contact with the mold1306 with just enough force to prevent/minimize any solder leakageduring the motion. The region 1320 above the solder, at time T₃, isevacuated, thereby directly removing any gas that was in the moldcavities 1306 as well as any gas above the solder 1318 or mixed into thesolder 1318. All gas in the cavities is directly carried away by thevacuum source.

The entire assembly comprising the fill head 1302, seal 1310, and moldplate 1306 are then slowly rotated 180 degrees at time T₄ (i.e., flippedover). This brings the mold plate 1306 underneath (substantially below)the fill head 1302, thereby allowing gravity to force the liquid solderto pool over the entire surface of the mold 1306 as compared to theinside of the seal 1310. The region 1320 above the solder 1318, at timeT₅, is then filled with high-pressure gas such as nitrogen to force thesolder 1318 into the previously evacuated cavities 1304. Sinceessentially all of the gas in the cavities 1304 was removed in theprevious step, the pressurized solder is virtually guaranteed tocompletely fill all of the cavities 1304 as desired.

Once the solder 1318 has been forced into the cavities 1304 and it makescontact with the cavity walls, the gas pressure above the solder 1318,at time T₆, can generally be reduced without affecting the solder-filledcavities. The mold 1306, at time T₇, is moved out from under the fillhead 1302 while the solder 1318 is held at a relatively low positivepressure with respect to the ambient environment. The wiping action ofthe seal 1310 during this motion acts to squeegee the solder 1318 off ofthe mold surface, thereby leaving only the solder 1318 which is in themold cavities 1304.

As can be seen from the above discussion the various examples of thepresent invention are advantageous in that they improve the reliabilityof the mold plate fill process by using a fill head and relatedprocesses that do not require a sealing member to withstand largepressure differentials while sliding across the mold plate. The sealingelement, according to various embodiments of the present invention, onlyhas to withstand high pressure differential while stationary, and onlyhas to withstand sliding motion while sealing against small pressuredifferentials. The solder fill head, according to certain examples, canbe at least as large as the full mold pattern to be filled. The fillhead is scanned onto a mold plate while the solder is kept near ambientpressure. A vacuum is then drawn above the pooled solder (which coversthe entire mold area) in order to draw any trapped air away from themold surface. After the air has been evacuated, the space above thepooled solder is highly pressurized with inert gas to force the solderinto the cavities.

The fill head is scanned off of the mold plate while the solder pressureis held at a relatively low pressure differential with respect toambient. Note that in this process, the seal was stationary duringhigh-pressure-differential operations such as vacuum evacuation andpressurized solder fill, and the seal was only sliding duringlow-pressure-differential operations such as mold loading and finalsolder wiping. This approach thus allows the use of high seal loadingforces during high-pressure operations which occur while stationary, andlow seal loading forces during sliding motion, thereby greatly reducingseal wear and increasing the range of seal materials which can be used.

Various embodiments of the present invention, as discussed above, alsoutilize a rotating or oscillating agitator blade to improve the vacuumevacuation of the cavities by aggressively stirring the molten solder soas to dislodge any gas bubbles adhering to the mold cavities. Anotheradvantage is that the entire mold plate plus solder fill head assemblycan be flipped over during the process, thereby allowing some processsteps (especially vacuum evacuation) to occur with the liquid soldersupply below and not in contact with the mold surface. Other processsteps (especially pressurized solder filling of the cavities) can occurwith the liquid solder above and in contact with the mold surface.

Process Of Filling A Non-Rectangular Mold With Solder

FIG. 14 is an operational flow diagram illustrating an example of aprocess of filling molds using a full-field coverage system. Theoperational flow diagram of FIG. 14 begins at step 1402 and flowsdirectly to step 1404. An unfilled mold 906, at step 1404, is placed inposition next to the full-field solder fill head 902. The unfilled mold906, at step 1406, is transitioned underneath the fill head 902. Thisoccurs while the solder within the fill head 902 is being held nearambient pressure. The seal 910, at step 1408, is held in contact withthe mold 906 with just enough force to prevent/minimize any solderleakage during the motion.

A region above the solder, at step 1410, is evacuated, causing most ofthe gas trapped in the cavities to bubble up through the solder, whereit is carried away by the vacuum source 916. The region above thesolder, at step 1412, is then filled with high-pressure gas such asnitrogen. The solder, at step 1414, is then forced into the moldcavities 904. Since most of the gas in the cavities 904 was removed inthe previous step, the pressurized solder is more likely to completelyfill the cavities 904 as desired. The gas pressure, at step 1416, abovethe solder is reduced without affecting the solder-filled cavities 904.The mold 906, at step 1418, is transitioned from under the fill head 902while the solder is held at a relatively low positive pressure withrespect to the ambient environment. The wiping action of the seal duringthis motion acts to squeegee the solder off of the mold surface, leavingonly the solder which is in the mold cavities 904. The control flow thenexits at step 1420.

Another Process Of Filling A Non-Rectangular Mold With Solder

FIG. 15 is an operational flow diagram illustrating another example of aprocess of filling molds using a full-field coverage system. Theoperational flow diagram of FIG. 15 begins at step 1502 and flowsdirectly to step 1504. An unfilled mold 1106, at step 1504, is placed inposition next to the full-field solder fill head 1102. The unfilled mold1106, at step 1506, is transitioned underneath the fill head 1102. Thisoccurs while the solder within the fill head 1102 is being held nearambient pressure. The seal 1110, at step 1508, is held in contact withthe mold 1106 with just enough force to prevent/minimize any solderleakage during the motion.

A region above the solder, at step 1510, is evacuated, causing most ofthe gas trapped in the cavities to bubble up through the solder, whereit is carried away by the vacuum source 1116. The solder within the fillhead 1102, at step 1512, is vigorously stirred and/or agitated todislodge any gas bubbles which remain adhered to the mold surface. Anydislodged bubbles then rise to the surface of the solder where they areremoved by the vacuum source 1116. The region above the solder, at step1514, is then filled with high-pressure gas such as nitrogen. Thesolder, at step 1516, is then forced into the mold cavities 1104. Sincemost of the gas in the cavities 1104 was removed in the previous step,the pressurized solder is more likely to completely fill the cavities1104 as desired. The gas pressure, at step 1518, above the solder isreduced without affecting the solder-filled cavities 1104. The mold1106, at step 1520, is transitioned from under the fill head 1102 whilethe solder is held at a relatively low positive pressure with respect tothe ambient environment. The wiping action of the seal during thismotion acts to squeegee the solder off of the mold surface, leaving onlythe solder which is in the mold cavities 1104. The control flow thenexits at step 1522.

Another Process Of Filling A Non-Rectangular Mold With Solder

FIGS. 16-17 are operational flow diagrams illustrating another exampleof a process of filling molds using a full-field coverage system. Theoperational flow diagram of FIG. 16 begins at step 1602 and flowsdirectly to step 1604. A full-field fill head 1302, at step 1604, ispositioned so that the seal 1310 is upward and the solder 1318 is pooledat the bottom of the fill head 1302 away from the seal. An unfilled mold1306, at step 1606, is placed in position next to the full-field solderfill head 1302. The unfilled mold 1306, at step 1608, is transitionedacross the fill head 1302. Gravity holds the solder 1318 away from theseal and mold 1306. The gas above the solder 1318 in the fill head 1302,at step 1610, is held substantially near ambient pressure. The seal1310, at step 1612, is held in contact with the mold 1306 with justenough force to prevent/minimize any solder 1318 leakage during themotion.

A region above the solder 1318, at step 1614, is evacuated, causing mostof the gas trapped in the cavities to bubble up through the solder 1318,where it is carried away by the vacuum source 1316. The fill head 1302and mold 1306, at step 1616, are transitioned 180 degrees so that themold 1306 is underneath the fill head, thereby allowing gravity to forcethe liquid solder 1318 to pool over the entire surface of the mold 1306(inside the seal 1310). The control flows to entry point A of FIG. 17.The region above the solder 1318, at step 1704, is then filled withhigh-pressure gas such as nitrogen. The solder 1318, at step 1706, isthen forced into the mold cavities 1304. Since most of the gas in thecavities 1304 was removed in the previous step, the pressurized solder1318 is more likely to completely fill the cavities 1304 as desired. Thegas pressure, at step 1708, above the solder 1318 is reduced withoutaffecting the solder-filled cavities 1304. The mold 1306, at step 1710,is transitioned from under the fill head 1302 while the solder 1318 isheld at a relatively low positive pressure with respect to the ambientenvironment. The wiping action of the seal during this motion acts tosqueegee the solder 1318 off of the mold surface, leaving only thesolder 1318, which is in the mold cavities 1304. The control flow thenexits at step 1712.

Non-Limiting Examples

The foregoing embodiments of the present invention are advantageousbecause they provide a technique for filling non-rectangular molds orsubstrates with a conductive bonding material using an IMS system. Thediscussed examples of the present invention allow for molds that moreclosely resemble their associated non-rectangular silicon wafer to beused. Furthermore, the fill heads provide a means for heating throughoutthe heads that melt material to be deposited into cavities of a mold andcooling gasses that solidify the material within the cavities.

Although specific embodiments of the invention have been disclosed,those having ordinary skill in the art will understand that changes canbe made to the specific embodiments without departing from the spiritand scope of the invention. The scope of the invention is not to berestricted, therefore, to the specific embodiments, and it is intendedthat the appended claims cover any and all such applications,modifications, and embodiments within the scope of the presentinvention.

1. A method of depositing conductive bonding material into a pluralityof cavities in a mold, the method comprising: placing a fill head insubstantial contact with a mold comprising a plurality of cavities,wherein the fill head comprises a sealing member that substantiallyencompasses an entire area including the plurality of cavities to befilled with conductive bonding material; forcing the conductive bondingmaterial out of the fill head toward the mold; and providing theconductive bonding material into at least one cavity of the plurality ofcavities contemporaneous with the at least one cavity being in proximityto the fill head.
 2. The method of claim 1, wherein the sealing memberresists higher differential pressures during at least the forcing of theconductive bonding material out of the fill head and the providing ofthe conductive bonding material into the at least one cavity.
 3. Themethod of claim 1, wherein the fill head remains substantiallystationary while the conductive bonding material is forced out of thefill head and provided into the at least one cavity.
 4. The method ofclaim 1, wherein the providing further comprises: creating a vacuum inat least one region that is situated above the conductive bondingmaterial that has been provided into the plurality of cavities, therebyremoving air in the plurality of cavities.
 5. The method of claim 1,wherein the forcing further comprises: filling a region above theconductive bonding material with a high pressure gas.
 6. The method ofclaim 1, further comprising at least one of: agitating and stirring theconductive bonding material that has been provided into the plurality ofcavities, thereby drawing air trapped in the cavities to a surface ofthe mold to be evacuated by a vacuum source.
 7. A method of depositingconductive bonding material into a plurality of cavities in a mold, themethod comprising: placing a fill head in substantial contact with amold comprising a plurality of cavities, wherein the fill head comprisesa sealing member that substantially encompasses an entire area to befilled with conductive bonding material, wherein the mold is situatedsubstantially directly above the fill head, and wherein the fill head issituated so that the sealing member is facing in an upward directionwith respect to the plurality of cavities; transitioning the fill headand mold so that the fill head is situated substantially directly abovethe mold and so that the plurality of cavities are facing in an upwarddirection with respect to the sealing member; forcing the conductivebonding material out of the fill head toward the mold; and providing theconductive bonding material into at least one cavity of the plurality ofcavities contemporaneous with the at least one cavity being in proximityto the fill head.
 8. The method of claim 7, wherein the transitioningfurther comprises; maintaining a seal created between the sealing memberand the mold at least while the fill head and mold are transitioned,thereby preventing any leakage of conductive bonding material.
 9. Themethod of claim 7, wherein the sealing member resists higherdifferential pressures during at least the forcing of the conductivebonding material out of the fill head and the providing of theconductive bonding material into the at least one cavity.
 10. The methodof claim 7, further comprising: creating a vacuum, prior to thetransitioning, in at least one region that is situated above theconductive bonding material in the fill head, thereby removing air inthe at least one of region above the conductive bonding material, in theconductive bonding material, and in the plurality of cavities.
 11. Themethod of claim 7, wherein the forcing further comprises: covering aregion above the conductive bonding material with a high pressure gas.12. The method of claim 7, wherein the transitioning causes theconductive bonding material to flow from the fill head oversubstantially the entire area of the mold encompassed by the sealingmember.
 13. A system for depositing conductive bonding material into aplurality of cavities in a mold, comprising: a controller; a fill head,communicatively coupled to the controller, for depositing conductivebonding material on a mold, wherein the fill head comprises a sealingmember that substantially encompasses an entire area to be filled on themold with conductive bonding material, and wherein the controller isadapted for controlling a semiconductor manufacturing process asfollows: placing the fill head in substantial contact with a moldcomprising a plurality of cavities; forcing the conductive bondingmaterial out of the fill head toward the mold; and providing theconductive bonding material into at least one cavity of the plurality ofcavities contemporaneous with the at least one cavity being in proximityto the fill head.
 14. The system of claim 13, further comprising avacuum source that is adapted to creating a vacuum in at least oneregion that is situated above the conductive bonding material that hasbeen provided into the plurality of cavities, thereby removing air inthe plurality of cavities.
 15. The system of claim 13, wherein the fillhead comprises at least one of an agitating member and a stirringmember, and wherein the at least one of an agitating member and astirring member is adapted to perform at least one of: agitating andstirring the conductive bonding material that has been provided into theplurality of cavities, thereby drawing air trapped in the cavities to asurface of the mold to be evacuated by a vacuum source.
 16. The systemof claim 13, wherein the forcing further comprises: covering withconductive bonding material substantially the entire area to be filledon the mold that is encompassed by the sealing member.
 17. An apparatusfor depositing conductive bonding material into a plurality of cavitiesin a mold, comprising: a fill head for substantially encompassing asurface area of a mold when the surface area is located in the fillhead, a volume being defined in the fill head between an inner surfaceof the fill head and the surface area of the mold, the surface areacomprising a plurality of cavities in the mold to be filled withconductive bonding material; a rotational mounting arrangementmechanically coupled with the fill head for rotating the fill head andthe mold as one mounted assembly between a first position and a secondposition; at least one gas exchange port communicatively coupled withthe volume thereby at least one of evacuating gas or fluid from thevolume in the fill head and providing gas or fluid into the volume; andwherein when the mounted assembly is at the first position, the surfacearea of the mold is located substantially at a top portion of the volumein the fill head and conductive bonding material is pooled in the volumeand substantially below the surface area of the mold, and gas or fluidcan be evacuated via the at least one gas exchange port from the volumeabove the conductive bonding material and from the plurality of cavitiesin the mold; and when the mounted assembly is rotated from the firstposition to the second position, the conductive bonding material islocated substantially above the surface area of the mold and flows intothe plurality of cavities to be filled with conductive bonding material.18. The apparatus of claim 17, wherein when the mounted assembly islocated in the second position, with the conductive bonding materialsubstantially above the surface area of the mold, gas or fluid isprovided via the at least one gas exchange port into the volume abovethe conductive bonding material forcing the conductive bonding materialinto the plurality of cavities to be filled with conductive bondingmaterial.
 19. The apparatus of claim 17, further comprising a sealingmember mechanically coupled with the fill head such that when the fillhead and the mold are one mounted assembly the sealing member creates aseal substantially encompassing the surface area of the mold in the fillhead.
 20. The apparatus of claim 19, wherein the sealing membersubstantially encompasses the surface area of the mold and while themold is moved out from under the fill head a wiping action of the sealacts to squeegee conductive bonding material off the surface area of themold while leaving conductive bonding material in the plurality ofcavities.